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Rotary-Planetary-Tilting Stage
Sharpened Silicon Tip
Important properties of the ultrathin Substratek™
depending on contact radius measured on a silver surface
High spring constant
Ultra-Flat Thermal SiO2 Substrates Select:ø6" Rotary-Planetary-Tilting StageDESCRIPTION 21620 6 21620 55 21620 57 21620 510 200nm Thermal Oxide on 6" Ultra Flat Wafer, Type <100>, in 6" wafer carrier 200nm Thermal Oxide on 5x5mm diced Ultra Flat Wafer, Type <100>, in Gel Pak box 200nm Thermal Oxide on 5x7mm diced Ultra Flat Wafer, Type <100>, in Gel Pak box 200nm Thermal Oxide on 10x10mm diced Ultra Flat Wafer, Type <100>, in Gel Pak box each box 25 box 18 box 6 The Ultra Flat SiO2 substrates consist of a 200nm thermally
